Products

Systems

PVD Sputtering Systems

Multi-source magnetron sputtering for metals, dielectrics, and compound films — R&D to production scale.

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Systems

DLC & TAC Coating Systems

Diamond-Like Carbon and Tetrahedral Amorphous Carbon — extreme hardness, low friction, extended component life.

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Systems

ALD Systems

Atomic Layer Deposition — nanometer-precision films with perfect conformality. Thermal & plasma-enhanced.

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Components

Magnetron Cathodes

Round, planar, and rotary cathodes — 2" to 12" — optimized for every deposition geometry and throughput need.

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Components

RF Power Supplies — 13.56MHz

RF generators from 300W to 3,000W at 13.56MHz for plasma processes and thin-film deposition.

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Components

Microwave Generators — 2.45GHz

Solid-state and magnetron-based microwave generators from 300W to 6kW for advanced plasma applications.

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