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RF & Microwave Power Supplies

射频与微波电源

Solid-state RF power supplies and automatic matchers — from 5 W to 3000 W at 2 / 13.56 / 27.12 MHz for stable sputtering and plasma processes.

全固态射频电源与自动匹配器——2 / 13.56 / 27.12 MHz，5 W 至 3000 W，为溅射与等离子体工艺提供稳定输出。

Overview产品概述

Stable RF power from a leading power-source maker

来自领先电源厂商的稳定射频功率

The AG series all-solid-state RF power supplies deliver highly stable sinusoidal RF output whether matched or unmatched, so they work with the AM series matchers and most third-party matchers. The intuitive LCD display, seven preset points and optional remote control (RS-232 / 485 or analog) make the units easy to integrate into automated equipment.

AG 系列全固态射频电源无论匹配与否均能输出稳定的标准正弦波射频功率，既可搭配 AM 系列匹配器，也可接入其他品牌匹配器使用。直观的 LCD 显示屏、7 组预置点以及可选远程控制（RS-232 / 485 或模拟量）使其易于融入自动化设备。

  • ✓ AG series: 5 – 3000 W, 2 / 13.56 / 27.12 MHz (±0.005%)
  • ✓ AG 系列：5 – 3000 W，2 / 13.56 / 27.12 MHz（±0.005%）
  • ✓ KERNEL half-rack series: 5 – 1000 W with reflected-power protection
  • ✓ KERNEL 半柜系列：5 – 1000 W，内置反射功率保护
  • ✓ AM digital auto matchers up to 3000 W (L / π network)
  • ✓ AM 数字式自动匹配器，最大 3000 W（L / π 型网络）
  • ✓ AGM integrated generator + matcher (5 – 300 W)
  • ✓ AGM 电源匹配器一体机（5 – 300 W）
  • ✓ Mass flow controllers for gas delivery
  • ✓ 质量流量控制器（MFC）用于气体输送
AG series RF power supply
Product Range产品范围

RF power supply family

射频电源产品系列

AG Series — solid-state RF generators

AG 系列——全固态射频电源

Model型号AG-1305/6AG-1310AG-1320AG-1330
Output power输出功率范围5 – 500/600 W5 – 1000 W10 – 2000 W30 – 3000 W
Frequency信号频率2 / 13.56 / 27.12 MHz ±0.005%
Max reflected power最大反射功率100 W200 W300 W400 W
Power stability功率稳定度±1%
Harmonics谐波分量≤ −50 dBc
Efficiency整机效率≥70%≥70%≥70%≥65%
Control控制方式Analog (15 / 25-pin ports) · Digital (RS-232 / 485)模拟（15 / 25 针接口）· 数字（RS-232 / 485）
RF output射频输出接口50 Ω, N-type or custom
Power supply供电电压Single-phase AC 187 – 253 V, 50/60 Hz (AG-1330: 3-phase 380 V)单相交流 187 – 253 V，50/60 Hz（AG-1330：三相 380 V）
Cooling冷却方式Forced airForced airForced airForced air + water强制风冷 + 水冷
Weight整机重量11 kg11 kg17 kg17 kg
Dimensions (H×W×D)尺寸（高×宽×深）88 × 483 × 500 mm132 × 483 × 500 mm

KERNEL Series — half-rack compact generators

KERNEL 系列——半柜式紧凑电源

Model型号KN-1306KN-1310
Output power输出功率范围5 – 600 W5 – 1000 W
Frequency信号频率2 / 13.56 / 27.12 MHz ±0.005%
Max reflected power最大反射功率100 W200 W
Power stability功率稳定度±0.5%
Harmonics谐波分量≤ −50 dBc
Efficiency整机效率≥75%
Control控制方式Analog (15 / 25-pin) · Digital (RS-232 / 485)模拟（15 / 25 针）· 数字（RS-232 / 485）
RF output射频输出接口50 Ω, N-type or custom
Power supply供电电压Single-phase AC 187 – 253 V, 50/60 Hz单相交流 187 – 253 V，50/60 Hz
Cooling冷却方式Forced air
Weight整机重量12 kg
Dimensions (H×W×D)尺寸（高×宽×深）145 × 265 × 500 mm

AM Series — digital automatic matchers

AM 系列——数字式自动匹配器

Model型号AM-1310AM-1315AM-1320AM-1330
Max transmit power最大传输功率0 – 1000 W0 – 1500 W0 – 2000 W0 – 3000 W
Frequency信号频率2 / 13.56 / 27.12 MHz ±0.005%
Reflected power反射功率<3 W<5 W<5 W<10 W
Tuning time调谐时间<2 s from preset point从预置点到匹配 <2 秒
Tuning network调谐网络L-type and π-typeL 型与 π 型均可
Stability稳定性No oscillation at any stable load任意稳定负载下均无振荡
Capacitors电容类型Dual vacuum capacitors双真空电容
RF output射频输出接口L29, copper-strap hard output or customL29，铜带硬输出或用户指定
Power supply供电电压Single-phase AC 187 – 253 V, 50/60 Hz单相交流 187 – 253 V，50/60 Hz
Cooling冷却方式Forced air (forced air + water for higher power)强制风冷（大功率型强制风冷 + 水冷）
Weight整机重量6.5 kg6.5 kg7.5 kg7.5 kg
Dimensions (D×W×H)尺寸（深×宽×高）390 × 260 × 131 mm or custom390 × 260 × 131 mm，或可自定制

AGM Series — integrated generator + matcher

AGM 系列——电源匹配器一体机

Parameter参数Value规格
Output power输出功率5 – 300 W5 – 300 W
Frequency信号频率2 / 13.56 / 27.12 MHz ±0.005%2 / 13.56 / 27.12 MHz ±0.005%
Max reflected power最大反射功率100 W100 W
Power stability功率稳定度±0.1%±0.1%
Harmonics谐波分量≤ −50 dBc≤ −50 dBc
Efficiency / power factor整机效率 / 功率因数≥70% / ≥90%≥70% / ≥90%
Matcher max transmit power匹配器最大传输功率500 W500 W
Reflected power at max最大功率时反射功率<3 W<3 W
Matchable impedance可匹配阻抗Real 0 – 80 Ω, Imag −j200 – +j100实部 0 – 80 Ω，虚部 −j200 – +j100
Matching time匹配时间1 – 3 s1 – 3 s
RF output connector射频输出接口50 Ω, N-type female / L29 or custom50 Ω，N 型母头 / L29 或定制
Cooling冷却方式Forced air强制风冷
Weight整机重量14 kg14 kg
Dimensions (H×W×D)尺寸（高×宽×深）132 × 483 × 476 mm132 × 483 × 476 mm

Microwave Generators & RPS

微波发生器与微波 RPS

Product产品Frequency频率Power Range功率范围
Microwave RPS (remote plasma source)微波 RPS（远程等离子体源）2.45 GHz2.45 GHz300 W – 6000 W300 W – 6000 W
Microwave generator (solid state)微波发生器（固态）2.45 GHz2.45 GHz300 W – 5000 W300 W – 5000 W
Microwave generator (magnetron)微波发生器（磁控管）2.45 GHz2.45 GHz1.25 kW – 6 kW1.25 kW – 6 kW

Microwave RPS units are typically paired with post-oxidation systems for low-damage oxidation of large-area films, and complement the RF generators above in sputtering and plasma processes.

微波 RPS 通常与后氧化系统搭配，用于大面积薄膜的低损伤氧化，并可与上述射频电源配合用于溅射与等离子体工艺。

RF sources are applied in plasma cleaning, RF ion sources, magnetron sputtering, PECVD, CVD and RF induction heating. Contact us for the latest datasheets and compatibility advice.

射频电源应用于等离子清洗、射频离子源、磁控溅射、PECVD、CVD 与射频感应加热等领域。如需最新规格书与兼容性建议，请联系我们。

Applications典型应用

Proven across plasma processes

广泛适用于各类等离子体工艺

Plasma Cleaning等离子清洗 RF Ion Sources射频离子源 Magnetron Sputtering磁控溅射 PECVDPECVD CVDCVD RF Induction Heating射频感应加热
Auxiliary & Spare Parts辅助设备与备件

Complete line support beyond the power rack

电源机柜之外的完整产线支持

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Semiconductor Spare Parts

半导体备件

Spare parts supply for semiconductor and vacuum equipment to reduce downtime.

半导体与真空设备备件供应，减少停机时间。

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Find the right power for your process

为您的工艺选择合适的电源

Contact us for specifications, compatibility and availability.

联系我们获取规格、兼容性与供货信息。

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