Gas and Control

气体输送与控制

Gas delivery and control for coating systems and semiconductor fabs — process gas panels, fully-automatic gas cabinets, gas cylinder racks and valve manifold boxes.

面向镀膜系统与半导体工厂的气体输送与控制——工艺气体面板、全自动气柜、气瓶架与阀门分配箱。

Overview产品概述

Precise, safe gas delivery from cylinder to process

从气瓶到工艺的精确、安全气体输送

Gas accuracy and safety decide process quality. SEMIVAC supplies the complete gas chain — process gas panels with mass flow control for coating and plasma tools, plus fully-automatic gas cabinets, gas cylinder racks and valve manifold boxes for semiconductor specialty-gas supply. PLC safety interlocks, high-purity valve sets, automatic purge and emergency shut-off keep delivery uninterrupted and operators protected.

气体精度与安全性决定工艺质量。SEMIVAC 提供完整气体链条——面向镀膜与等离子体设备的带质量流量控制的工艺气体面板，以及面向半导体特种气体供应的全自动气柜、气瓶架与阀门分配箱。PLC 安全联锁、高纯阀组、自动吹扫与紧急切断保障供应不间断、操作人员安全。

✓ MFC-based process gas panels with recipe-driven control
✓ 基于 MFC 的工艺气体面板，配方驱动控制
✓ Fully-automatic gas cabinets (GC) for specialty gases
✓ 特种气体全自动气柜（GC）
✓ Gas cylinder racks and valve manifold boxes (VMB)
✓ 气瓶架与阀门分配箱（VMB）
✓ PLC interlocks, auto-purge and emergency shut-off
✓ PLC 联锁、自动吹扫与紧急切断
✓ Turn-key gas-house integration and SEMI-compliant design
✓ 一站式气站集成与 SEMI 合规设计

Product Line产品系列

Specialty-gas handling systems

特种气体处理系统

Fully-Automatic Gas Cabinet (GC)

全自动气柜（GC）

Dedicated storage, purification and supply for flammable, explosive, corrosive and toxic specialty gases — touchscreen operation, automatic purging, automatic cylinder switchover and alarm-linked emergency shut-off, with PLC safety interlocks and high-purity valve sets.

面向易燃、易爆、腐蚀性与毒性特种气体的存储、纯化与供应——触摸屏操作、自动吹扫、自动切换气瓶、报警联动紧急切断，配备 PLC 安全联锁与高纯阀组。

Gas Cylinder Rack

气瓶架

Simplified gas cabinet for inert / ultra-high-purity gas storage and handling — automatic cylinder switchover, LED push-button controls with digital display, pressure sensors, pneumatic valves and excess-flow meters.

面向惰性 / 超高纯气体的简化气柜——自动切换气瓶、LED 按键与数码显示、压力传感器、气动阀与过流流量计。

Valve Manifold Box (VMB)

阀门分配箱（VMB）

Multi-channel gas distribution to individual process points near the tools — stable supply per outlet, PN₂ purge and secondary pressure regulation, shorter hook-up piping and lower capital cost.

靠近机台的多通道气体分配——每路独立稳定供气、PN₂ 吹扫与二级调压，缩短连接管路、降低投资成本。

Key Features核心特性

Safety, stability and control in every unit

每一台设备都安全、稳定、可控

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Dual Safety Design

双重安全设计

Hardware sensors and pressure transmitters feed the PLC for real-time comparison against setpoints — automatic gas cut-off and alarm triggering as required.

硬件传感器与压力变送器实时上传 PLC 与设定值比对——按需自动切断供气并触发报警。

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Easy Operation

操作简便

Touchscreen or LED push-button control with digital display, one-touch automated operating modes and programmable automatic switchover.

触摸屏或 LED 按键 + 数码显示，一键式自动化操作模式与可编程自动切换。

⇄

Dual Signal Output

双信号输出

Network output uploads status, alarms and supply pressure to central control; hard-wired output routes key signals to terminal blocks for external systems.

网络输出将状态、报警与供气压力上传中央控制；硬线输出将关键信号送至端子排供外部系统接线。

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High Compatibility & Stability

高兼容与高稳定

Flexible parameter settings adapt to various specialty gases; PLC-driven control delivers accurate operation, low failure rate and long-term stability.

灵活参数设置适配多种特种气体；PLC 控制精准可靠、故障率低、长期稳定。

⌁

Complete Alarm Records

完整报警记录

Full alarm logs with trigger, end and confirmation time and event details for full traceability.

完整报警日志，记录触发、结束、确认时间与事件详情，实现全程可追溯。

⇅

Remote Control

远程控制

Network-enabled remote operation and system management.

支持基于网络的远程操作与系统管理。

Process Gas Control工艺气体控制

Precision gas panels for coating & plasma systems

面向镀膜与等离子体系统的高精度气体面板

⇆

Gas Panel

气体面板

Mass flow controllers, pneumatic valves, filters and pressure regulators assembled on a leak-tight manifold.

在密封汇流管路上集成质量流量控制器、气动阀、过滤器与压力调节器。

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Control Unit

控制单元

PLC / PC-based control with touch HMI, recipe management and real-time process data logging.

基于 PLC / PC 的控制系统，配备触摸屏人机界面、配方管理与实时工艺数据记录。

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Safety & Interlocks

安全与联锁

Gas detection, pressure interlocks and emergency shutdown to protect operators and process chambers.

气体检测、压力联锁与紧急停机，保护操作人员与工艺腔体安全。

Services配套服务

Turn-key gas systems, delivered and supported

一站式气体系统交付与支持

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Turn-Key Gas House Integration

一站式气站集成

Gas house design and piping layout for semiconductor central gas supply systems.

半导体中央供气系统的气站设计与管路布局。

▣

Custom & SEMI-Compliant Design

定制与 SEMI 合规设计

Custom-built equipment and SEMI-compliant gas system design.

定制设备与符合 SEMI 规范的气体系统设计。

⚙

Installation & Maintenance

安装与维护

On-site installation, commissioning, preventive maintenance, troubleshooting and spare-parts supply.

现场安装、调试、预防性维护、故障排除与备件供应。

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Regional Support

区域支持

Local technical support across Southeast-Asia.

覆盖东南亚的本地技术支持。

Wafer Fabrication晶圆制造 Wide-Bandgap (GaN / SiC)宽禁带半导体（GaN / SiC） Photovoltaic光伏 Optoelectronics光电子 MEMSMEMS R&D Laboratories研发实验室