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Magnetron Cathodes

磁控阴极

Round, planar and rotary magnetron cathodes for uniform thin-film deposition in R&D and production.

圆形、平面与旋转磁控阴极，满足研发与量产的均匀薄膜沉积需求。

Overview产品概述

The right cathode for every coating geometry

为每种镀膜几何形态选择合适的阴极

Magnetron cathodes are the heart of any sputtering system. SEMIVAC supplies round, planar and rotary cathodes engineered for deposition uniformity, target utilization and process stability across research, display, glass, solar and decorative coating applications.

磁控阴极是任何溅射系统的核心。SEMIVAC 提供圆形、平面与旋转阴极，针对研发、显示、玻璃、太阳能与装饰镀膜应用的沉积均匀性、靶材利用率与工艺稳定性而设计。

  • ✓ Circular targets for compact, uniform deposition
  • ✓ 圆形靶材，结构紧凑、沉积均匀
  • ✓ Planar cathodes for large-area coating with excellent uniformity
  • ✓ 平面阴极适合大面积镀膜，均匀性优异
  • ✓ Rotary cathodes with up to 80–90% target utilization
  • ✓ 旋转阴极靶材利用率最高可达 80–90%
Round type magnetron cathode
Comparison类型对比

Round · Planar · Rotary

圆形 · 平面 · 旋转

Round type cathode

Round Type

圆形阴极

Planar type cathode

Planar Type

平面阴极

Rotary type cathode

Rotary Type

旋转阴极

Feature特性 Round Type圆形阴极 Planar Type平面阴极 Rotary Type旋转阴极
Description描述Features a circular target for uniform thin-film deposition on relatively small substrates.采用圆形靶材，适合较小基片的均匀薄膜沉积。Features a rectangular target designed for large-area coating with excellent film uniformity.采用矩形靶材，面向大面积镀膜，均匀性优异。Uses a rotating cylindrical target to maximize target utilization and provide continuous, uniform deposition.采用旋转圆柱靶材，最大化靶材利用率并提供连续均匀的沉积。
Target Shape靶材形状 Circular圆形 Rectangular矩形 Cylindrical (rotary tube)圆柱形（旋转管）
Main Advantages主要优势 Compact design, uniform deposition, easy target replacement, ideal for R&D设计紧凑、沉积均匀、换靶方便，适合研发 Excellent for large substrates, high uniformity, scalable for production适合大尺寸基片、均匀性高、可扩展量产 Highest utilization (80–90%), longer target life, high deposition rates, lower cost利用率最高（80–90%）、靶材寿命长、沉积速率高、运行成本低
Typical Applications典型应用 Semiconductor, R&D, optical coating半导体、研发、光学镀膜 Display panels, architectural glass, solar cells, decorative coating显示面板、建筑玻璃、太阳能电池、装饰镀膜 Large-area glass, display manufacturing, solar panels, roll-to-roll大面积玻璃、显示制造、太阳能板、卷对卷
Best Suited For适用场景 Small wafers, laboratory systems, precision coating小尺寸晶圆、实验室系统、精密镀膜 Batch coating, large flat substrates批量镀膜、大平面基片 Continuous, high-throughput industrial coating连续高通量工业镀膜
Semiconductor半导体 Display显示 Optical Coating光学镀膜 Decorative Coating装饰镀膜 Solar太阳能 Data Storage数据存储 R&D研发

Select the right cathode for your system

为您的系统选择合适阴极

Tell us your target size, substrate and process — we will recommend the right cathode configuration.

告诉我们您的靶材尺寸、基片与工艺——我们将推荐合适的阴极配置。

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