Vacuum Pump Repair

真空泵维修

Diagnosis, overhaul, leak-checking and preventive maintenance for rotary vane, roots, turbomolecular and dry vacuum pumps.

旋片泵、罗茨泵、分子泵与干式真空泵的诊断、大修、检漏与预防性维护。

Overview服务概述

Keep your vacuum system performing at its best

让真空系统保持最佳运行状态

Vacuum pumps are critical to stable thin-film processes. SEMIVAC provides professional diagnosis, overhaul and performance testing for rotary vane, roots, turbomolecular and dry pumps, helping minimize downtime and extend service life.

真空泵是稳定薄膜工艺的关键设备。SEMIVAC 为旋片泵、罗茨泵、分子泵与干式真空泵提供专业诊断、大修与性能测试，帮助减少停机并延长使用寿命。

✓ Rotary vane, roots, turbomolecular and dry pump repair
✓ 旋片泵、罗茨泵、分子泵与干泵维修
✓ Complete overhaul and performance testing
✓ 整机大修与性能测试
✓ Leak detection and sealing
✓ 检漏与密封处理
✓ Preventive maintenance programs
✓ 预防性维护计划

Services服务项目

What we cover

服务范围

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Repair

故障维修

Fault diagnosis and targeted repair to restore pump performance.

故障诊断与针对性维修，恢复泵的运行性能。

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Overhaul

整机大修

Full disassembly, cleaning, parts replacement and reassembly.

全面拆解、清洗、更换零件并重新装配。

⇄

Preventive Maintenance

预防性维护

Scheduled inspection and servicing to avoid unplanned stops.

定期检查与保养，避免非计划停机。

Need vacuum pump service?

需要真空泵服务？

Tell us the pump model and fault symptoms for a quick repair assessment.

告诉我们泵的型号与故障现象，获取快速维修评估。

Request Repair → 申请维修 →