RF Power Supply Repair & Second-Hand Sales

射频电源维修及二手销售

Repair and maintenance of RF generators and supporting components for the coating and semiconductor industry — 400 kHz to 60 MHz, 50 W to 20 kW — plus certified second-hand sales.

面向镀膜与半导体行业的射频电源及配套组件维修与保养——覆盖 400 kHz–60 MHz、50 W–20 kW，并提供认证二手电源销售。

Overview服务概述

Full RF coverage for coating and semiconductor processes

全面覆盖镀膜与半导体工艺的射频维修

RF power is the heart of plasma-based coating, cleaning and semiconductor processes. SEMIVAC repairs the complete RF chain — generators, matching networks and associated modules — across the industry-standard frequency bands from 400 kHz to 60 MHz and power levels from 50 W to 20 kW. We also provide tested, certified second-hand RF power supplies with technical support.

射频电源是等离子体镀膜、清洗与半导体工艺的核心。SEMIVAC 提供完整的射频链路维修——发生器、匹配网络及配套模组，覆盖 400 kHz–60 MHz 行业标准频段与 50 W–20 kW 功率等级，并提供经测试认证的二手射频电源及技术支持。

✓ RF generators: 400 kHz, 2 MHz, 13.56 MHz, 27.12 / 40.68 / 60 MHz
✓ 射频发生器：400 kHz、2 MHz、13.56 MHz、27.12 / 40.68 / 60 MHz
✓ Power range 50 W – 20 kW (air-cooled & water-cooled)
✓ 功率 50 W – 20 kW（风冷与液冷机型）
✓ CW & pulse RF, matching networks and RF modules
✓ 连续波 / 脉冲射频电源、匹配器与射频模组
✓ Certified second-hand power supply sales
✓ 认证二手电源销售

Operating Frequencies主流工作频率

Industry-standard RF bands for coating & semiconductor

覆盖镀膜 / 半导体行业通用射频频段

Frequency	工作频率	Typical Applications	典型应用
400 kHz (0.4 MHz)	400 kHz（0.4 MHz）	Bias power supplies and sputter-assist supplies; semiconductor etching and PVD processes.	多用于偏压电源、溅射辅助电源；半导体刻蚀、PVD 工艺。
2 MHz	2 MHz	ICP plasma sources, PECVD, thin-film deposition RF generators.	ICP 等离子源、PECVD、薄膜沉积设备射频发生器。
13.56 MHz — industry standard (primary repair band)	13.56 MHz——行业最通用（主力维修频段）	Magnetron sputtering, plasma cleaning, optical coating, wafer activation — standard RF source for Round / Planar / Rotary sputtering cathodes.	磁控溅射、等离子清洗、光学镀膜、晶圆活化——Round / Planar / Rotary 三类溅射阴极标配射频源。
27.12 / 40.68 / 60 MHz	27.12 / 40.68 / 60 MHz	High-density plasma processes; high-frequency RF sources for high-end semiconductor etch equipment.	高密度等离子工艺；高端半导体刻蚀设备高频射频电源。

Power Range可维修功率区间

From 50 W laboratory units to 20 kW production sources

从 50 W 实验室机型到 20 kW 量产机型

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Air-Cooled Units

风冷机型

50 W · 100 W · 300 W · 600 W · 800 W · 1000 W (1 kW) · 1500 W (1.5 kW) · 2000 W (2 kW) · 3000 W (3 kW)

50 W、100 W、300 W、600 W、800 W、1000 W（1 kW）、1500 W（1.5 kW）、2000 W（2 kW）、3000 W（3 kW）

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Water-Cooled High-Power Units

水冷大功率机型

4 kW · 5 kW · 6 kW · 8 kW · 10 kW · 12 kW · 15 kW · 20 kW

4 kW、5 kW、6 kW、8 kW、10 kW、12 kW、15 kW、20 kW

Adapted scenarios: complete RF power supply systems for round sputtering cathodes, planar rectangular sputtering cathodes and rotary cylindrical sputtering cathodes.

适配场景：圆形溅射阴极、平面矩形溅射阴极、旋转圆柱溅射阴极的整套射频供电系统。

Equipment Types设备类型

RF complete units & supporting components

射频整机 + 配套组件

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CW RF Generators

连续波射频发生器（CW RF Generator）

Continuous-wave RF generators for sputtering, cleaning and plasma processes.

用于溅射、清洗与等离子体工艺的连续波射频发生器。

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Pulse RF Power Supplies

脉冲式射频电源（Pulse RF）

Pulsed RF supplies with duty-cycle modulation for advanced process control.

带占空比调制的脉冲式射频电源，满足先进工艺控制需求。

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RF Automatic Matching Networks

射频自动阻抗匹配器

RF match / matching network repair — complete-set repair together with RF power supplies, matched to the corresponding frequency and power.

RF Match / Matching Network 维修——和射频电源成套维修，适配对应频率与功率。

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RF Distribution & Sensing Modules

射频分配与检测模组

RF distribution units, VI sensors and RF power detection modules.

射频分配单元、VI 传感器、射频功率检测模组。

Supported Brands主流维修品牌

Mainstream brands we service

我们支持的主流品牌

Hüttinger (霍廷格)Hüttinger 霍廷格 AE Advanced EnergyAE Advanced Energy ENIENI SEREN (赛恩)SEREN 赛恩 MKSMKS HITEKHITEK COMDELCOMDEL and more等

Compatible Replacements平替电源统计

Compatible replacement power supplies for AMAT & LAM tools

适配 AMAT / LAM 机台的平替电源

The following RF / DC power supplies are available as compatible replacements for AMAT (Applied Materials) and LAM process tools — directly interchangeable with the original part numbers, at lower cost and with faster delivery. Contact us for availability, cross-referencing and repair support.

以下射频 / 直流电源可作为 AMAT（应用材料）与 LAM 工艺机台的平替电源——与原型号直接互换，成本更低、交期更快。如需现货、型号对照与维修支持，请联系我们。

#	Brand品牌	Model型号	Full Model完整型号	Applicable Tool适用机台	Main Specifications主要性能参数	Remarks备注
1	ENI	GMW25A	GMW25A-2D0F2N0-003	AMAT	3×208 V, 1.8–2.17 MHz, 2500 W	0190-36308
2	ENI	GMW25Z	GMW25Z-2D0F3N0-001	AMAT	3×480 V, 2 MHz, 2500 W	0190-06989 / 0190-89498
3	ENI	GHW50A	GHW50A-13DF3H0-003	AMAT	3×208 V, 13.56 MHz, 5000 W	AM200-HDPECVD
4	ENI	GHW50A	GHW50A-13DF3L0-006	LAM	3×208 V, 13.56 MHz, 5000 W	660-178383-001
5	ENI	NOVA-50A	NOVA-50A-04	AMAT	3×208 V, 1.8–2.17 MHz, 5300 W	AM200-HDPECVD
6	ENI	NOVA-50A	NOVA-50A-10	AMAT	3×208 V, 1.8–2.17 MHz, 5300 W	AM200-HDPECVD
7	ENI	GHW12Z	GHW12Z-13DF2N0-001	AMAT	3×480 V, 13.56 MHz, 1250 W	0190-49002 · 300 mm CVD
8	ENI	GHW12A	GHW12A-13DF2N0-002	AMAT	3×208 V, 13.56 MHz, 1250 W	300 mm CVD
9	ENI/LAM	DFC2300	DOFBC2-083 (R083)	LAM	3×208 V, 27.12 MHz, 3000 W	660-002294-002
10	ENI/LAM	DFC2300	DOFBC2-084 (R084)	LAM	3×208 V, 2 MHz, 5000 W	660-002295-R002
11	ENI/LAM	ONE-BOX	000-1134-077 (R077)	LAM	3×208 V, 27.12 MHz, 1800 W	—
12	ENI/LAM	ONE-BOX	000-1134-076 (R076)	LAM	3×208 V, 2 MHz, 2500 W	660-099877-402
13	AE	MDX-L12M	3152313-001	AMAT	3×208 V, 12 kW (500 V)	0190-76191
14	AE	MDX-L12M-650	3152344-100	AMAT	3×208 V, 12 kW (650 V)	0190-76192
15	ENI	LMF5002A	LMF5002-10B-05	LAM	3×208 V, 1.8–2.17 MHz, 5000 W	660-072823-200

Brands: ENI / ENI-LAM / AE (Advanced Energy). Replacements are cross-referenced against the original part numbers for direct interchangeability.

品牌：ENI / ENI-LAM / AE（Advanced Energy）。平替型号均已与原厂件号交叉对照，可直接互换。