Vacuum Pump & Power Supply Repair

真空泵 / 电源维修服务

Professional repair and maintenance for vacuum pumps, RF / microwave power supplies and auxiliary equipment — keeping your systems running.

真空泵、射频 / 微波电源及辅助设备的专业维修与保养——让您的系统持续稳定运行。

Overview服务概述

Minimize downtime, maximize uptime

缩短停机，提升运行时间

Vacuum pumps and power supplies are the workhorses of any coating system. SEMIVAC provides diagnosis, repair and preventive maintenance for vacuum pumps, power supplies and auxiliary equipment, backed by engineers who understand the full system — not just a single component.

真空泵与电源是镀膜系统的动力核心。SEMIVAC 提供真空泵、电源及辅助设备的诊断、维修与预防性保养，由熟悉整套系统的工程师提供支持，而非仅仅针对单一部件。

✓ Vacuum pump diagnosis, overhaul and performance testing
✓ 真空泵诊断、大修与性能测试
✓ Power supply repair: RF, DC, pulsed-DC and microwave
✓ 电源维修：RF、DC、脉冲 DC 与微波电源
✓ Preventive maintenance programs to reduce unplanned stops
✓ 预防性维护方案，减少非计划停机
✓ Auxiliary equipment: cooling and utility systems
✓ 辅助设备：冷却与配套公用设施

Services服务项目

What we cover

服务范围

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Vacuum Pumps

真空泵

Rotary vane, roots, turbomolecular and dry pumps — repair, overhaul and leak-checking.

旋片泵、罗茨泵、分子泵与干泵——维修、大修与检漏。

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Power Supplies

电源设备

RF generators, DC / pulsed-DC supplies, microwave generators — troubleshooting and repair.

射频电源、DC / 脉冲 DC 电源、微波发生器——故障排查与维修。

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Auxiliary Systems

辅助系统

Cooling and utility systems for complete line support.

冷却与公用系统，提供完整产线支持。

Equipment down? Describe the symptoms

设备停机？描述故障现象

Send us the fault description and equipment details for a repair assessment.

将故障现象与设备信息发给我们，获取维修评估。

Request Repair → 申请维修 →